
* Sample runset for 45 nm
* technology
* Cadence QRC version 6.2 process file for GPDK45
* generated by GTE Version: 03.03.000  Build: @894 (20080922091431) on Oct 2, 2008

* --------------------------------------------------------------------------------
* VERSION v0.1.0 (initial version)
* --------------------------------------------------------------------------------
* New:
* - Basic Assura RCX ( no bias or erosion )
* - 7/24/07 penni Separated RCX data from DRC document.
*                           Added bias, erosion data.
* Bug fixes:
* -9/18/2008  Simplified Rho values per Accelicon gpdk045_PDK_Model_Report


process GPDK45

deposition
*step #   substrate       layer     thick     diel
*step #   metal           layer     thick     w_bias    bot_delta,top_delta erosion data
*step #   dielectric p    name      Xt        diel      ov_etch
*step #   dielectric n    name      Xt        diel      Xs              Xb        angle     [Sth Xsp p b c Ev]

step 1    substrate       FOX       .35       3.9
step 1    substrate       Oxide     0.02      3.9
step 2    metal           poly_conn .1        -0.003
step 3    dielectric n    diel1     .03       7         0               .03       90
step 4    dielectric p    diel2     .3        4.2
step 5    metal           metal1_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.01:0.06,1.50,0.01:0.06,3.00,0.01:0.06,4.05,0.01:0.08,0.06,0.01:0.08,0.08,0.01:0.08,0.09,0.01:0.08,0.13,0.00:0.08,0.16,0.01:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.01:0.08,1.50,0.01:0.08,3.00,0.01:0.08,4.05,0.01:0.09,0.06,0.01:0.09,0.08,0.01:0.09,0.09,0.01:0.09,0.13,0.00:0.09,0.16,0.01:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.01:0.09,1.50,0.01:0.09,3.00,0.01:0.09,4.05,0.01:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.01:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.01:0.13,1.50,0.01:0.13,3.00,0.01:0.13,4.05,0.01:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.01:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.01:0.16,1.50,0.01:0.16,3.00,0.01:0.16,4.05,0.01:0.19,0.06,0.02:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.01:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.01:0.19,1.50,0.01:0.19,3.00,0.01:0.19,4.05,0.01:0.26,0.06,0.02:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.01:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.01:0.26,1.50,0.01:0.26,3.00,0.01:0.26,4.05,0.01:0.38,0.06,0.02:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.01:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.01:0.38,1.50,0.01:0.38,3.00,0.01:0.38,4.05,0.01:0.63,0.06,0.02:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.01:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.01:0.63,1.50,0.01:0.63,3.00,0.01:0.63,4.05,0.01:0.83,0.06,0.02:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.01:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.01:0.83,1.50,0.01:0.83,3.00,0.01:0.83,4.05,0.01:1.50,0.06,0.02:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.01:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.01:1.50,1.50,0.01:1.50,3.00,0.01:1.50,4.05,0.01:3.00,0.06,0.02:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.01:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.01:3.00,1.50,0.01:3.00,3.00,0.01:3.00,4.05,0.01:5.00,0.06,0.02:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.01:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.01:5.00,1.50,0.01:5.00,3.00,0.01:5.00,4.05,0.01 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.34:0.05,0.09,1.29:0.05,0.13,1.24:0.05,0.16,1.23:0.05,0.19,1.22:0.05,0.26,1.21:0.05,0.38,1.18:0.05,0.50,1.16:0.05,0.63,1.15:0.05,0.83,1.13:0.05,1.00,1.11:0.05,1.50,1.09:0.05,3.00,1.04:0.05,4.05,1.02:0.10,0.06,1.17:0.10,0.08,1.32:0.10,0.09,1.27:0.10,0.13,1.22:0.10,0.16,1.22:0.10,0.19,1.21:0.10,0.26,1.20:0.10,0.38,1.18:0.10,0.50,1.16:0.10,0.63,1.15:0.10,0.83,1.13:0.10,1.00,1.11:0.10,1.50,1.09:0.10,3.00,1.04:0.10,4.05,1.02:0.15,0.06,1.16:0.15,0.08,1.29:0.15,0.09,1.25:0.15,0.13,1.21:0.15,0.16,1.20:0.15,0.19,1.20:0.15,0.26,1.19:0.15,0.38,1.18:0.15,0.50,1.16:0.15,0.63,1.15:0.15,0.83,1.13:0.15,1.00,1.11:0.15,1.50,1.09:0.15,3.00,1.04:0.15,4.05,1.02:0.20,0.06,1.14:0.20,0.08,1.26:0.20,0.09,1.23:0.20,0.13,1.19:0.20,0.16,1.19:0.20,0.19,1.19:0.20,0.26,1.18:0.20,0.38,1.17:0.20,0.50,1.16:0.20,0.63,1.15:0.20,0.83,1.13:0.20,1.00,1.12:0.20,1.50,1.09:0.20,3.00,1.04:0.20,4.05,1.02:0.25,0.06,1.13:0.25,0.08,1.24:0.25,0.09,1.21:0.25,0.13,1.18:0.25,0.16,1.18:0.25,0.19,1.18:0.25,0.26,1.17:0.25,0.38,1.16:0.25,0.50,1.15:0.25,0.63,1.14:0.25,0.83,1.13:0.25,1.00,1.12:0.25,1.50,1.09:0.25,3.00,1.04:0.25,4.05,1.02:0.30,0.06,1.11:0.30,0.08,1.23:0.30,0.09,1.19:0.30,0.13,1.17:0.30,0.16,1.17:0.30,0.19,1.17:0.30,0.26,1.16:0.30,0.38,1.15:0.30,0.50,1.14:0.30,0.63,1.13:0.30,0.83,1.12:0.30,1.00,1.11:0.30,1.50,1.09:0.30,3.00,1.04:0.30,4.05,1.02:0.35,0.06,1.09:0.35,0.08,1.22:0.35,0.09,1.18:0.35,0.13,1.17:0.35,0.16,1.16:0.35,0.19,1.16:0.35,0.26,1.15:0.35,0.38,1.14:0.35,0.50,1.13:0.35,0.63,1.12:0.35,0.83,1.11:0.35,1.00,1.10:0.35,1.50,1.09:0.35,3.00,1.04:0.35,4.05,1.02:0.40,0.06,1.07:0.40,0.08,1.21:0.40,0.09,1.16:0.40,0.13,1.16:0.40,0.16,1.16:0.40,0.19,1.15:0.40,0.26,1.14:0.40,0.38,1.13:0.40,0.50,1.12:0.40,0.63,1.11:0.40,0.83,1.10:0.40,1.00,1.09:0.40,1.50,1.09:0.40,3.00,1.04:0.40,4.05,1.02:0.45,0.06,1.04:0.45,0.08,1.21:0.45,0.09,1.15:0.45,0.13,1.15:0.45,0.16,1.15:0.45,0.19,1.14:0.45,0.26,1.13:0.45,0.38,1.12:0.45,0.50,1.11:0.45,0.63,1.10:0.45,0.83,1.09:0.45,1.00,1.08:0.45,1.50,1.08:0.45,3.00,1.04:0.45,4.05,1.02:0.50,0.06,1.02:0.50,0.08,1.19:0.50,0.09,1.13:0.50,0.13,1.15:0.50,0.16,1.14:0.50,0.19,1.13:0.50,0.26,1.12:0.50,0.38,1.11:0.50,0.50,1.10:0.50,0.63,1.09:0.50,0.83,1.08:0.50,1.00,1.07:0.50,1.50,1.07:0.50,3.00,1.04:0.50,4.05,1.02:0.55,0.06,1.02:0.55,0.08,1.16:0.55,0.09,1.11:0.55,0.13,1.13:0.55,0.16,1.13:0.55,0.19,1.12:0.55,0.26,1.11:0.55,0.38,1.10:0.55,0.50,1.09:0.55,0.63,1.08:0.55,0.83,1.07:0.55,1.00,1.07:0.55,1.50,1.06:0.55,3.00,1.03:0.55,4.05,1.02:0.60,0.06,1.02:0.60,0.08,1.14:0.60,0.09,1.09:0.60,0.13,1.11:0.60,0.16,1.11:0.60,0.19,1.11:0.60,0.26,1.10:0.60,0.38,1.09:0.60,0.50,1.08:0.60,0.63,1.08:0.60,0.83,1.07:0.60,1.00,1.06:0.60,1.50,1.05:0.60,3.00,1.03:0.60,4.05,1.01:0.65,0.06,1.02:0.65,0.08,1.14:0.65,0.09,1.09:0.65,0.13,1.09:0.65,0.16,1.08:0.65,0.19,1.08:0.65,0.26,1.08:0.65,0.38,1.08:0.65,0.50,1.08:0.65,0.63,1.07:0.65,0.83,1.07:0.65,1.00,1.06:0.65,1.50,1.04:0.65,3.00,1.02:0.65,4.05,1.01:0.70,0.06,1.02:0.70,0.08,1.14:0.70,0.09,1.09:0.70,0.13,1.08:0.70,0.16,1.05:0.70,0.19,1.05:0.70,0.26,1.06:0.70,0.38,1.06:0.70,0.50,1.07:0.70,0.63,1.07:0.70,0.83,1.06:0.70,1.00,1.06:0.70,1.50,1.03:0.70,3.00,1.01:0.70,4.05,1.01:0.75,0.06,1.02:0.75,0.08,1.14:0.75,0.09,1.09:0.75,0.13,1.08:0.75,0.16,1.05:0.75,0.19,1.02:0.75,0.26,1.02:0.75,0.38,1.04:0.75,0.50,1.05:0.75,0.63,1.06:0.75,0.83,1.06:0.75,1.00,1.05:0.75,1.50,1.01:0.75,3.00,1.01:0.75,4.05,1.00:0.80,0.06,1.02:0.80,0.08,1.14:0.80,0.09,1.09:0.80,0.13,1.08:0.80,0.16,1.05:0.80,0.19,1.02:0.80,0.26,0.98:0.80,0.38,1.01:0.80,0.50,1.04:0.80,0.63,1.05:0.80,0.83,1.05:0.80,1.00,1.05:0.80,1.50,0.99:0.80,3.00,1.00:0.80,4.05,0.99:0.85,0.06,1.02:0.85,0.08,1.14:0.85,0.09,1.09:0.85,0.13,1.08:0.85,0.16,1.05:0.85,0.19,1.02:0.85,0.26,0.98:0.85,0.38,0.97:0.85,0.50,1.01:0.85,0.63,1.03:0.85,0.83,1.04:0.85,1.00,1.04:0.85,1.50,0.97:0.85,3.00,0.98:0.85,4.05,0.97:0.90,0.06,1.02:0.90,0.08,1.14:0.90,0.09,1.09:0.90,0.13,1.08:0.90,0.16,1.05:0.90,0.19,1.02:0.90,0.26,0.98:0.90,0.38,0.96:0.90,0.50,0.97:0.90,0.63,1.00:0.90,0.83,1.03:0.90,1.00,1.02:0.90,1.50,0.94:0.90,3.00,0.96:0.90,4.05,0.95:0.95,0.06,1.02:0.95,0.08,1.14:0.95,0.09,1.09:0.95,0.13,1.08:0.95,0.16,1.05:0.95,0.19,1.02:0.95,0.26,0.98:0.95,0.38,0.96:0.95,0.50,0.97:0.95,0.63,0.99:0.95,0.83,1.01:0.95,1.00,1.00:0.95,1.50,0.90:0.95,3.00,0.93:0.95,4.05,0.91:1.00,0.06,1.02:1.00,0.08,1.14:1.00,0.09,1.09:1.00,0.13,1.08:1.00,0.16,1.05:1.00,0.19,1.02:1.00,0.26,0.98:1.00,0.38,0.96:1.00,0.50,0.97:1.00,0.63,0.99:1.00,0.83,1.01:1.00,1.00,1.00:1.00,1.50,0.88:1.00,3.00,0.90:1.00,4.05,0.87
step 6    dielectric n    diel3     0         4.2       side_wall(0)    .15       auto_angle
step 7    dielectric p    diel4     .3        2.6
step 8    metal           metal2_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 9    dielectric n    diel5     0         4.2       side_wall(0)    .15       auto_angle
step 10   dielectric p    diel6     .3        2.6
step 11   metal           metal3_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 12   dielectric n    diel7     0         4.2       side_wall(0)    .15       auto_angle
step 13   dielectric p    diel8     .3        2.6
step 14   metal           metal4_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 15   dielectric n    diel9     0         4.2       side_wall(0)    .15       auto_angle
step 16   dielectric p    diel10    .3        2.6
step 17   metal           metal5_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 18   dielectric n    diel11    0         4.2       side_wall(0)    .15       auto_angle
step 19   dielectric p    diel12    .3        2.6
step 20   metal           metal6_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 21   dielectric n    diel13    0         4.2       side_wall(0)    .15       auto_angle
step 22   dielectric p    diel14    .3        2.6
step 23   metal           metal7_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 24   dielectric n    diel15    0         4.2       side_wall(0)    .15       auto_angle
step 25   dielectric p    diel16    .3        2.6
step 26   metal           metal8_conn .15       s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 27   dielectric n    diel17    0         4.2       side_wall(0)    .15       auto_angle
step 28   dielectric p    diel18    .3        2.6
step 29   metal           metal9_conn 1         s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 30   dielectric n    diel19    0         4.2       side_wall(0)    1         auto_angle
step 31   dielectric p    diel20    .6        4.2
step 32   metal           metal10_conn 1         s,w:0.06,0.06,0.00:0.06,0.08,0.00:0.06,0.09,0.00:0.06,0.13,0.00:0.06,0.16,0.00:0.06,0.19,0.00:0.06,0.26,0.00:0.06,0.38,0.00:0.06,0.50,0.00:0.06,0.63,0.00:0.06,0.83,0.00:0.06,1.00,0.00:0.06,1.50,0.00:0.06,3.00,0.00:0.06,4.05,0.00:0.08,0.06,0.00:0.08,0.08,0.00:0.08,0.09,0.00:0.08,0.13,0.00:0.08,0.16,0.00:0.08,0.19,0.00:0.08,0.26,0.00:0.08,0.38,0.00:0.08,0.50,0.00:0.08,0.63,0.00:0.08,0.83,0.00:0.08,1.00,0.00:0.08,1.50,0.00:0.08,3.00,0.00:0.08,4.05,0.00:0.09,0.06,0.00:0.09,0.08,0.00:0.09,0.09,0.00:0.09,0.13,0.00:0.09,0.16,0.00:0.09,0.19,0.00:0.09,0.26,0.00:0.09,0.38,0.00:0.09,0.50,0.00:0.09,0.63,0.00:0.09,0.83,0.00:0.09,1.00,0.00:0.09,1.50,0.00:0.09,3.00,0.00:0.09,4.05,0.00:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0.00:0.13,0.16,0.00:0.13,0.19,0.00:0.13,0.26,0.00:0.13,0.38,0.00:0.13,0.50,0.00:0.13,0.63,0.00:0.13,0.83,0.00:0.13,1.00,0.00:0.13,1.50,0.00:0.13,3.00,0.00:0.13,4.05,0.00:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0.00:0.16,0.16,0.00:0.16,0.19,0.00:0.16,0.26,0.00:0.16,0.38,0.00:0.16,0.50,0.00:0.16,0.63,0.00:0.16,0.83,0.00:0.16,1.00,0.00:0.16,1.50,0.00:0.16,3.00,0.00:0.16,4.05,0.00:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0.00:0.19,0.16,0.00:0.19,0.19,0.00:0.19,0.26,0.00:0.19,0.38,0.00:0.19,0.50,0.00:0.19,0.63,0.00:0.19,0.83,0.00:0.19,1.00,0.00:0.19,1.50,0.00:0.19,3.00,0.00:0.19,4.05,0.00:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0.00:0.26,0.16,0.00:0.26,0.19,0.00:0.26,0.26,0.00:0.26,0.38,0.00:0.26,0.50,0.00:0.26,0.63,0.00:0.26,0.83,0.00:0.26,1.00,0.00:0.26,1.50,0.00:0.26,3.00,0.00:0.26,4.05,0.00:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0.00:0.38,0.16,0.00:0.38,0.19,0.00:0.38,0.26,0.00:0.38,0.38,0.00:0.38,0.50,0.00:0.38,0.63,0.00:0.38,0.83,0.00:0.38,1.00,0.00:0.38,1.50,0.00:0.38,3.00,0.00:0.38,4.05,0.00:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0.00:0.63,0.16,0.00:0.63,0.19,0.00:0.63,0.26,0.00:0.63,0.38,0.00:0.63,0.50,0.00:0.63,0.63,0.00:0.63,0.83,0.00:0.63,1.00,0.00:0.63,1.50,0.00:0.63,3.00,0.00:0.63,4.05,0.00:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0.00:0.83,0.16,0.00:0.83,0.19,0.00:0.83,0.26,0.00:0.83,0.38,0.00:0.83,0.50,0.00:0.83,0.63,0.00:0.83,0.83,0.00:0.83,1.00,0.00:0.83,1.50,0.00:0.83,3.00,0.00:0.83,4.05,0.00:1.50,0.06,0.01:1.50,0.08,0.01:1.50,0.09,0.01:1.50,0.13,0.00:1.50,0.16,0.00:1.50,0.19,0.00:1.50,0.26,0.00:1.50,0.38,0.00:1.50,0.50,0.00:1.50,0.63,0.00:1.50,0.83,0.00:1.50,1.00,0.00:1.50,1.50,0.00:1.50,3.00,0.00:1.50,4.05,0.00:3.00,0.06,0.01:3.00,0.08,0.01:3.00,0.09,0.01:3.00,0.13,0.00:3.00,0.16,0.00:3.00,0.19,0.00:3.00,0.26,0.00:3.00,0.38,0.00:3.00,0.50,0.00:3.00,0.63,0.00:3.00,0.83,0.00:3.00,1.00,0.00:3.00,1.50,0.00:3.00,3.00,0.00:3.00,4.05,0.00:5.00,0.06,0.01:5.00,0.08,0.01:5.00,0.09,0.01:5.00,0.13,0.00:5.00,0.16,0.00:5.00,0.19,0.00:5.00,0.26,0.00:5.00,0.38,0.00:5.00,0.50,0.00:5.00,0.63,0.00:5.00,0.83,0.00:5.00,1.00,0.00:5.00,1.50,0.00:5.00,3.00,0.00:5.00,4.05,0.00 -0.01,0.01 100:tw:0.05,0.06,1.19:0.05,0.08,1.25:0.05,0.09,1.26:0.05,0.13,1.24:0.05,0.16,1.25:0.05,0.19,1.26:0.05,0.26,1.26:0.05,0.38,1.26:0.05,0.50,1.25:0.05,0.63,1.23:0.05,0.83,1.20:0.05,1.00,1.18:0.05,1.50,1.17:0.05,3.00,1.13:0.05,4.05,1.08:0.10,0.06,1.19:0.10,0.08,1.25:0.10,0.09,1.25:0.10,0.13,1.23:0.10,0.16,1.24:0.10,0.19,1.25:0.10,0.26,1.25:0.10,0.38,1.26:0.10,0.50,1.25:0.10,0.63,1.23:0.10,0.83,1.20:0.10,1.00,1.18:0.10,1.50,1.17:0.10,3.00,1.13:0.10,4.05,1.08:0.15,0.06,1.18:0.15,0.08,1.24:0.15,0.09,1.24:0.15,0.13,1.23:0.15,0.16,1.24:0.15,0.19,1.24:0.15,0.26,1.25:0.15,0.38,1.25:0.15,0.50,1.24:0.15,0.63,1.23:0.15,0.83,1.20:0.15,1.00,1.18:0.15,1.50,1.17:0.15,3.00,1.13:0.15,4.05,1.08:0.20,0.06,1.18:0.20,0.08,1.23:0.20,0.09,1.24:0.20,0.13,1.24:0.20,0.16,1.24:0.20,0.19,1.24:0.20,0.26,1.24:0.20,0.38,1.24:0.20,0.50,1.24:0.20,0.63,1.23:0.20,0.83,1.21:0.20,1.00,1.19:0.20,1.50,1.17:0.20,3.00,1.13:0.20,4.05,1.08:0.25,0.06,1.18:0.25,0.08,1.23:0.25,0.09,1.24:0.25,0.13,1.24:0.25,0.16,1.24:0.25,0.19,1.24:0.25,0.26,1.24:0.25,0.38,1.24:0.25,0.50,1.23:0.25,0.63,1.22:0.25,0.83,1.21:0.25,1.00,1.20:0.25,1.50,1.18:0.25,3.00,1.13:0.25,4.05,1.08:0.30,0.06,1.17:0.30,0.08,1.23:0.30,0.09,1.24:0.30,0.13,1.24:0.30,0.16,1.24:0.30,0.19,1.24:0.30,0.26,1.24:0.30,0.38,1.23:0.30,0.50,1.23:0.30,0.63,1.22:0.30,0.83,1.21:0.30,1.00,1.20:0.30,1.50,1.18:0.30,3.00,1.13:0.30,4.05,1.08:0.35,0.06,1.15:0.35,0.08,1.23:0.35,0.09,1.24:0.35,0.13,1.23:0.35,0.16,1.23:0.35,0.19,1.23:0.35,0.26,1.23:0.35,0.38,1.23:0.35,0.50,1.22:0.35,0.63,1.21:0.35,0.83,1.20:0.35,1.00,1.19:0.35,1.50,1.17:0.35,3.00,1.13:0.35,4.05,1.08:0.40,0.06,1.12:0.40,0.08,1.21:0.40,0.09,1.24:0.40,0.13,1.23:0.40,0.16,1.23:0.40,0.19,1.23:0.40,0.26,1.23:0.40,0.38,1.22:0.40,0.50,1.22:0.40,0.63,1.21:0.40,0.83,1.20:0.40,1.00,1.19:0.40,1.50,1.16:0.40,3.00,1.13:0.40,4.05,1.08:0.45,0.06,1.06:0.45,0.08,1.18:0.45,0.09,1.22:0.45,0.13,1.21:0.45,0.16,1.22:0.45,0.19,1.22:0.45,0.26,1.22:0.45,0.38,1.22:0.45,0.50,1.22:0.45,0.63,1.21:0.45,0.83,1.20:0.45,1.00,1.19:0.45,1.50,1.15:0.45,3.00,1.12:0.45,4.05,1.08:0.50,0.06,0.98:0.50,0.08,1.12:0.50,0.09,1.17:0.50,0.13,1.19:0.50,0.16,1.20:0.50,0.19,1.20:0.50,0.26,1.21:0.50,0.38,1.21:0.50,0.50,1.22:0.50,0.63,1.21:0.50,0.83,1.20:0.50,1.00,1.19:0.50,1.50,1.14:0.50,3.00,1.10:0.50,4.05,1.11:0.55,0.06,0.98:0.55,0.08,1.01:0.55,0.09,1.06:0.55,0.13,1.17:0.55,0.16,1.17:0.55,0.19,1.18:0.55,0.26,1.19:0.55,0.38,1.21:0.55,0.50,1.21:0.55,0.63,1.22:0.55,0.83,1.21:0.55,1.00,1.19:0.55,1.50,1.13:0.55,3.00,1.08:0.55,4.05,1.10:0.60,0.06,0.98:0.60,0.08,1.01:0.60,0.09,1.00:0.60,0.13,1.13:0.60,0.16,1.14:0.60,0.19,1.15:0.60,0.26,1.17:0.60,0.38,1.20:0.60,0.50,1.21:0.60,0.63,1.22:0.60,0.83,1.21:0.60,1.00,1.20:0.60,1.50,1.13:0.60,3.00,1.07:0.60,4.05,1.08:0.65,0.06,0.98:0.65,0.08,1.01:0.65,0.09,1.00:0.65,0.13,1.09:0.65,0.16,1.11:0.65,0.19,1.12:0.65,0.26,1.15:0.65,0.38,1.18:0.65,0.50,1.21:0.65,0.63,1.22:0.65,0.83,1.22:0.65,1.00,1.21:0.65,1.50,1.13:0.65,3.00,1.06:0.65,4.05,1.05:0.70,0.06,0.98:0.70,0.08,1.01:0.70,0.09,1.00:0.70,0.13,1.09:0.70,0.16,1.07:0.70,0.19,1.08:0.70,0.26,1.11:0.70,0.38,1.16:0.70,0.50,1.19:0.70,0.63,1.21:0.70,0.83,1.22:0.70,1.00,1.21:0.70,1.50,1.14:0.70,3.00,1.07:0.70,4.05,1.05:0.75,0.06,0.98:0.75,0.08,1.01:0.75,0.09,1.00:0.75,0.13,1.09:0.75,0.16,1.07:0.75,0.19,1.03:0.75,0.26,1.07:0.75,0.38,1.13:0.75,0.50,1.17:0.75,0.63,1.20:0.75,0.83,1.21:0.75,1.00,1.21:0.75,1.50,1.14:0.75,3.00,1.08:0.75,4.05,1.06:0.80,0.06,0.98:0.80,0.08,1.01:0.80,0.09,1.00:0.80,0.13,1.09:0.80,0.16,1.07:0.80,0.19,1.03:0.80,0.26,1.03:0.80,0.38,1.09:0.80,0.50,1.14:0.80,0.63,1.17:0.80,0.83,1.19:0.80,1.00,1.20:0.80,1.50,1.14:0.80,3.00,1.09:0.80,4.05,1.07:0.85,0.06,0.98:0.85,0.08,1.01:0.85,0.09,1.00:0.85,0.13,1.09:0.85,0.16,1.07:0.85,0.19,1.03:0.85,0.26,1.03:0.85,0.38,1.03:0.85,0.50,1.08:0.85,0.63,1.12:0.85,0.83,1.16:0.85,1.00,1.16:0.85,1.50,1.12:0.85,3.00,1.09:0.85,4.05,1.09:0.90,0.06,0.98:0.90,0.08,1.01:0.90,0.09,1.00:0.90,0.13,1.09:0.90,0.16,1.07:0.90,0.19,1.03:0.90,0.26,1.03:0.90,0.38,1.03:0.90,0.50,1.04:0.90,0.63,1.05:0.90,0.83,1.09:0.90,1.00,1.11:0.90,1.50,1.09:0.90,3.00,1.08:0.90,4.05,1.08:0.95,0.06,0.98:0.95,0.08,1.01:0.95,0.09,1.00:0.95,0.13,1.09:0.95,0.16,1.07:0.95,0.19,1.03:0.95,0.26,1.03:0.95,0.38,1.03:0.95,0.50,1.04:0.95,0.63,1.05:0.95,0.83,1.05:0.95,1.00,1.04:0.95,1.50,1.02:0.95,3.00,1.02:0.95,4.05,1.02:1.00,0.06,0.98:1.00,0.08,1.01:1.00,0.09,1.00:1.00,0.13,1.09:1.00,0.16,1.07:1.00,0.19,1.03:1.00,0.26,1.03:1.00,0.38,1.03:1.00,0.50,1.04:1.00,0.63,1.05:1.00,0.83,1.05:1.00,1.00,1.04:1.00,1.50,1.01:1.00,3.00,0.96:1.00,4.05,0.93
step 33   dielectric n    diel21    0         4.2       side_wall(0)    1         auto_angle
step 34   dielectric p    diel22    .6        4.2
step 35   metal           metal11_conn 1.4       s,w:1.80,2.70,0.00:1.80,5.40,0.00:1.80,8.10,0.00:1.80,10.80,0.00:1.80,13.50,0.00:3.60,2.70,0.00:3.60,5.40,0.00:3.60,8.10,0.00:3.60,10.80,0.00:3.60,13.50,0.00:5.40,2.70,0.00:5.40,5.40,0.00:5.40,8.10,0.00:5.40,10.80,0.00:5.40,13.50,0.00:7.20,2.70,0.00:7.20,5.40,0.00:7.20,8.10,0.00:7.20,10.80,0.00:7.20,13.50,0 0.18,-0.15
step 36   dielectric n    diel23    0         4.2       side_wall(0)    1.4       auto_angle
step 37   dielectric p    diel24    .65       4.2
step 38   dielectric p    diel25    .75       8
step 39   dielectric p    diel26    40        1
enddeposition

metal_variations
*         layer     w/s       min       max       incr
layer     poly_conn s         0.04      0.08      0.01
layer     poly_conn s         0.09      0.18      0.09
layer     poly_conn s         0.36      0.72      0.36
layer     poly_conn s         1.35      2.35      2.00
layer     poly_conn w         0.04      0.07      0.04
layer     poly_conn w         0.14      0.29      0.14
layer     poly_conn w         0.54      1.35      0.81
layer     metal1_conn s         0.06      0.07      0.01
layer     metal1_conn s         0.08      0.10      0.02
layer     metal1_conn s         0.13      0.25      0.13
layer     metal1_conn s         0.50      0.94      0.44
layer     metal1_conn w         0.06      0.07      0.01
layer     metal1_conn w         0.08      0.10      0.02
layer     metal1_conn w         0.13      0.16      0.03
layer     metal1_conn w         0.19      0.25      0.06
layer     metal1_conn w         0.50      0.83      0.33
layer     metal1_conn w         0.94      1.95      2.00
layer     metal2_conn s         0.06      0.09      0.03
layer     metal2_conn s         0.13      0.25      0.13
layer     metal2_conn s         0.50      0.94      0.44
layer     metal2_conn w         0.06      0.08      0.02
layer     metal2_conn w         0.09      0.13      0.03
layer     metal2_conn w         0.19      0.25      0.06
layer     metal2_conn w         0.50      0.63      0.13
layer     metal2_conn w         0.94      1.95      2.00
layer     metal3_conn s         0.06      0.09      0.03
layer     metal3_conn s         0.13      0.25      0.13
layer     metal3_conn s         0.50      0.94      0.44
layer     metal3_conn w         0.06      0.08      0.02
layer     metal3_conn w         0.09      0.13      0.03
layer     metal3_conn w         0.19      0.25      0.06
layer     metal3_conn w         0.50      0.63      0.13
layer     metal3_conn w         0.94      1.95      2.00
layer     metal4_conn s         0.06      0.09      0.03
layer     metal4_conn s         0.13      0.25      0.13
layer     metal4_conn s         0.50      0.94      0.44
layer     metal4_conn w         0.06      0.08      0.02
layer     metal4_conn w         0.09      0.13      0.03
layer     metal4_conn w         0.19      0.25      0.06
layer     metal4_conn w         0.50      0.63      0.13
layer     metal4_conn w         0.94      1.95      2.00
layer     metal5_conn s         0.06      0.09      0.03
layer     metal5_conn s         0.13      0.25      0.13
layer     metal5_conn s         0.50      0.94      0.44
layer     metal5_conn s         1.57      2.58      2.00
layer     metal5_conn w         0.06      0.08      0.02
layer     metal5_conn w         0.09      0.13      0.03
layer     metal5_conn w         0.19      0.25      0.06
layer     metal5_conn w         0.50      0.63      0.13
layer     metal5_conn w         0.94      1.95      2.00
layer     metal6_conn s         0.06      0.09      0.03
layer     metal6_conn s         0.13      0.25      0.13
layer     metal6_conn s         0.50      0.94      0.44
layer     metal6_conn s         1.57      2.58      2.00
layer     metal6_conn w         0.06      0.08      0.02
layer     metal6_conn w         0.09      0.13      0.03
layer     metal6_conn w         0.19      0.25      0.06
layer     metal6_conn w         0.50      0.63      0.13
layer     metal6_conn w         0.94      1.95      2.00
layer     metal7_conn s         0.06      0.09      0.03
layer     metal7_conn s         0.13      0.25      0.13
layer     metal7_conn s         0.50      0.94      0.44
layer     metal7_conn s         1.57      2.58      2.00
layer     metal7_conn w         0.06      0.08      0.02
layer     metal7_conn w         0.09      0.13      0.03
layer     metal7_conn w         0.19      0.25      0.06
layer     metal7_conn w         0.50      0.63      0.13
layer     metal7_conn w         0.94      1.95      2.00
layer     metal8_conn s         0.06      0.09      0.03
layer     metal8_conn s         0.13      0.25      0.13
layer     metal8_conn s         0.50      0.94      0.44
layer     metal8_conn s         1.57      2.58      2.00
layer     metal8_conn w         0.06      0.08      0.02
layer     metal8_conn w         0.09      0.13      0.03
layer     metal8_conn w         0.19      0.25      0.06
layer     metal8_conn w         0.50      0.63      0.13
layer     metal8_conn w         0.94      1.95      2.00
layer     metal9_conn s         0.36      0.72      0.36
layer     metal9_conn s         1.44      2.88      1.44
layer     metal9_conn s         4.05      4.50      0.45
layer     metal9_conn s         4.95      5.40      0.45
layer     metal9_conn w         0.36      0.72      0.36
layer     metal9_conn w         1.44      2.88      1.44
layer     metal9_conn w         5.40      6.40      2.00
layer     metal10_conn s         0.36      0.72      0.36
layer     metal10_conn s         1.44      2.88      1.44
layer     metal10_conn s         4.05      4.50      0.45
layer     metal10_conn s         4.95      5.40      0.45
layer     metal10_conn w         0.36      0.72      0.36
layer     metal10_conn w         1.44      2.88      1.44
layer     metal10_conn w         5.40      6.40      2.00
layer     metal11_conn s         1.80      3.60      1.80
layer     metal11_conn s         7.20      14.40     7.20
layer     metal11_conn s         23.40     24.40     2.00
layer     metal11_conn w         2.70      5.40      2.70
layer     metal11_conn w         10.80     21.60     10.80
layer     metal11_conn w         40.50     41.50     2.00
endmetal_variations

metal_combinations
*         layer1    layer2    s_min     s_max     incr
layers    poly_conn metal1_conn 0.00      0.06      0.06
layers    poly_conn metal1_conn 0.27      0.68      0.41
layers    poly_conn metal1_conn 1.35      2.35      2.00
layers    poly_conn metal2_conn 0.00      0.06      0.06
layers    poly_conn metal2_conn 0.27      0.68      0.41
layers    poly_conn metal2_conn 1.35      2.35      2.00
layers    metal1_conn metal2_conn 0.00      0.06      0.06
layers    metal1_conn metal2_conn 0.20      0.47      0.27
layers    metal1_conn metal2_conn 0.94      1.95      2.00
layers    metal1_conn metal3_conn 0.00      0.06      0.06
layers    metal1_conn metal3_conn 0.20      0.47      0.27
layers    metal1_conn metal3_conn 0.94      1.95      2.00
layers    metal2_conn metal3_conn 0.00      0.06      0.06
layers    metal2_conn metal3_conn 0.20      0.47      0.27
layers    metal2_conn metal3_conn 0.94      1.95      2.00
layers    metal2_conn metal4_conn 0.00      0.06      0.06
layers    metal2_conn metal4_conn 0.20      0.47      0.27
layers    metal2_conn metal4_conn 0.94      1.95      2.00
layers    metal3_conn metal4_conn 0.00      0.06      0.06
layers    metal3_conn metal4_conn 0.20      0.47      0.27
layers    metal3_conn metal4_conn 0.94      1.95      2.00
layers    metal3_conn metal5_conn 0.00      0.06      0.06
layers    metal3_conn metal5_conn 0.30      0.79      0.48
layers    metal3_conn metal5_conn 1.57      2.58      2.00
layers    metal4_conn metal5_conn 0.00      0.06      0.06
layers    metal4_conn metal5_conn 0.30      0.79      0.48
layers    metal4_conn metal5_conn 1.57      2.58      2.00
layers    metal4_conn metal6_conn 0.00      0.06      0.06
layers    metal4_conn metal6_conn 0.30      0.79      0.48
layers    metal4_conn metal6_conn 1.57      2.58      2.00
layers    metal5_conn metal6_conn 0.00      0.06      0.06
layers    metal5_conn metal6_conn 0.30      0.79      0.48
layers    metal5_conn metal6_conn 1.57      2.58      2.00
layers    metal5_conn metal7_conn 0.00      0.06      0.06
layers    metal5_conn metal7_conn 0.30      0.79      0.48
layers    metal5_conn metal7_conn 1.57      2.58      2.00
layers    metal6_conn metal7_conn 0.00      0.06      0.06
layers    metal6_conn metal7_conn 0.30      0.79      0.48
layers    metal6_conn metal7_conn 1.57      2.58      2.00
layers    metal6_conn metal8_conn 0.00      0.06      0.06
layers    metal6_conn metal8_conn 0.30      0.79      0.48
layers    metal6_conn metal8_conn 1.57      2.58      2.00
layers    metal7_conn metal8_conn 0.00      0.06      0.06
layers    metal7_conn metal8_conn 0.30      0.79      0.48
layers    metal7_conn metal8_conn 1.57      2.58      2.00
layers    metal7_conn metal9_conn 0.00      0.06      0.06
layers    metal7_conn metal9_conn 0.51      1.85      1.34
layers    metal7_conn metal9_conn 2.70      5.40      2.70
layers    metal8_conn metal9_conn 0.00      0.06      0.06
layers    metal8_conn metal9_conn 0.51      1.85      1.34
layers    metal8_conn metal9_conn 2.70      5.40      2.70
layers    metal8_conn metal10_conn 0.00      0.06      0.06
layers    metal8_conn metal10_conn 0.51      1.85      1.34
layers    metal8_conn metal10_conn 2.70      5.40      2.70
layers    metal9_conn metal10_conn 0.00      0.36      0.36
layers    metal9_conn metal10_conn 1.14      2.70      1.56
layers    metal9_conn metal10_conn 5.40      6.40      2.00
layers    metal9_conn metal11_conn 0.00      0.36      0.36
layers    metal9_conn metal11_conn 2.28      8.07      5.79
layers    metal9_conn metal11_conn 11.70     23.40     11.70
layers    metal10_conn metal11_conn 0.00      0.36      0.36
layers    metal10_conn metal11_conn 2.28      8.07      5.79
layers    metal10_conn metal11_conn 11.70     23.40     11.70
endmetal_combinations

endprocess
